ASTM F1619-95(2000) Standard Test Method for Measurement of Interstitial Oxygen Content of Silicon W

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标准类别：国外标准

关键词： ASTM F1619 95 2000 Standard

标准简介

ASTM F1619-95(2000) Standard Test Method for Measurement of Interstitial Oxygen Content of Silicon Wafers by Infrared Absorption Spectroscopy with p-Polarized Radiation Incident at the Brewster Angle